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Tag: 5 Electron Beam Lithography

Technology
marysmith

5 Electron Beam Lithography Hacks

Origin of Electron Beam Lithography System and what exactly is it – Electron projection lithography is an imaging technique that is quite similar to that of the optic stepper. SCALPEL (Scattering with Angular Limitation Projection Electron Beam Lithography,) and IBM (International Business Machines)  were popular for using this lithography technique in the 1990s. Electron Beam […]

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